OOptino  vs Zygo Interferometer

-A small area (7mm) of a hard-disk platter was tested using
 the Zygo GPI xp HR (high resolution) interferometer

-The same area was tested with our standard instrument Optino/Sensoft

-Both the tests were done in double pass at 632.8nm

-A high quality lambda/20 flat mirror was used for the calibration

Measured parameters

 

Parameter

Zygo GPIxp HR

Optino Pro

Difference

P-V (nm)

93.2

100.2

7

Rms (nm)

18.3

20.3

2

Defocus (nm)

-23.2

-19.9

-3.3

P-V (waves)

0.1473

0.1596

0.011

Results

optino_zygo
   
                             3D Surface plot from Zygo 3D surface plot from Optino